Clean rooms can provide a relatively dust-free and sterile environment to ensure product quality and protect personnel health. They are suitable for various high-demand scientific research, production and manufacturing fields, the most common of which are semiconductors, biomedicine and other fields.
In clean rooms, plate type primary filters are a common purification process equipment, and their structure mainly includes outer frame, filter material and protective net. The outer frame is usually made of paper frame, aluminum alloy frame, galvanized iron frame or stainless steel frame. The filter material is made of non-woven fabric, nylon mesh, activated carbon filter cotton, metal mesh and other materials. The protective net has two types: double-sided plastic-sprayed wire mesh and double-sided galvanized wire mesh, which can be selected according to actual needs.
In general, the design features of clean room plate type primary filters are as follows:
1. The folding primary filter adopts a welded wire mesh, which is treated with surface anti-rust and can effectively fix the linear pleated structure.
2. The galvanized iron mesh of the primary filter is attached to the air outlet surface of the filter material, which can protect the filter material from being blown and deformed due to excessive wind pressure, ensuring that all filter material surfaces can be fully utilized.
3. The primary filter adopts a gradient structure, providing a larger filtration area. The filtration area of the folded filter is 5 times that of the general flat filter.
4. The primary filter can use ordinary or moisture-proof paper frames to reduce costs. After use, the paper frame filter can be incinerated, which is pollution-free and meets environmental protection requirements.
5. The folded primary filter has a variety of filtration efficiencies to choose from, generally G1-G4.
The clean room plate primary filter is mainly used for primary filtration of fresh air and air conditioning systems, effectively filtering particles, dust and various suspended solids above 5.0μm. It can be used as a primary filter for air intake and exhaust devices, and can be used for primary or intermediate filtration of air conditioning filtration systems. This filter is widely used in ventilation and air conditioning systems of large civil buildings such as office buildings, hospitals, shopping malls, gymnasiums, and airports. When used with medium efficiency filters, it can effectively protect expensive high efficiency or ultra-high efficiency filters.
Through its unique design features and application areas, clean room plate type primary filter can effectively improve air quality, which is of great significance for protecting people's health and comfort.
The production environment for semiconductor devices is extremely sensitive to the presence of contaminants. Even small amounts of gaseous or particulate contaminants can reduce product quality. Therefore, cleanliness requirements in semiconductor device manufacturing are far higher than in other industries.
Throughout the entire chip and semiconductor device manufacturing process, process environment contamination control is crucial. The air cleanliness of core processes needs to meet ISO Class 1 standards, with gaseous molecular contaminant (AMC) concentrations below one part per billion. Substandard process environments can lead to a significant reduction in product yield.
Ordinary air contains a large number of particulate contaminants such as microparticles and dust, as well as gaseous contaminants such as sulfur dioxide, nitrogen oxides, and ammoniaaa. Only after treatment can it enter a cleanroom. Because cleanrooms used for producing semiconductors and other microelectronic devices must maintain standard cleanliness levels 24/7, the cleanroom air conditioning system (including the exhaust system), its associated heat and cold sources, and corresponding delivery systems must operate 24 hours a day, which is significantly different from other conventional air conditioning systems.
As the power source, the fan consumes most of its energy due to the combined resistance of its components. Furthermore, the air filter's resistance accounts for approximately 50% of the fan's total head. Therefore, reducing the energy consumption of air conditioning filters is crucial for lowering building energy consumption and carbon emissions. From the perspective of improving energy efficiency and reducing energy consumption, optimizing air filter performance without compromising filtration requirements is essential.
Filter energy consumption is directly determined by average resistance and is related to initial resistance and dust holding capacity. Reducing initial resistance, increasing dust holding capacity, and minimizing the increase in resistance during dust holding are effective ways to reduce energy consumption, thus lowering energy costs for customers and contributing to environmental protection.